NACH OBEN

Dr.-Ing. Lars Banko

SymbolbildRaum: IC 03/211
Telefon: +49 (0)234-32-21496

E-Mail

 
 
 
Veröffentlichungen

L. Banko, S. Ries, D. Grochla, M. Arghavani, S. Salomon, J. Pfetzing-Micklich, A. Kostka, J. Schulze, P. Awakovicz, A. Ludwig (2019)
Effects of the ion to growth flux ratio on the constitution and mechanical properties of Cr1-xAl
xN thin films: A combinatorial material science study including plasma diagnostics
ACS Comb. Sci., 21, 12, 782-792, DOI: 10.1021/acscombsci.9b00123

https://pubs.acs.org/doi/abs/10.1021/acscombsci.9b00123

S. Ries, L. Banko, M. Hans, D. Primetzhofer, J. Schneider, A. Ludwig, P. Awakowicz, J. Schulze (2019)
Ion energy control via the electric asymmetry effect to tune coating properties in reactive radio frequency sputtering
Plasma Sources Sci. Technol. 28, 114001, DOI: 10.1088/1361-6595/ab504b

https://iopscience.iop.org/article/10.1088/1361-6595/ab504b

D. Kirchheim, S. Wilski, M. Jaritz, F. Mitschker, M. Oberberg, J. Trieschmann, L. Banko, M. Nrochhagen, R. Schreckenberg, C. Hopmann, M. Bröke, J. Benedikt, T. de los Arcos, G. Grundmeier, D. Grochla, A. Ludwig, T. Mussenbrock, R.P. Brinkmann, P. Awakowicz. R. Dahlmann (2019)
Improved homogeneity of plasma and coating properties using a lance matrix gas distribution in MW-PECV
J. Coat. Technol. Res. 16, 573-583

https://www.springerprofessional.de/improved-homogeneity-of-plasma-and-coating-properties-using-a-la/16178590

M. Gebhard, L. Mai, L. Banko, F. Mitschker, C. Hoppe, M. Jaritz, D. Kirchheim, C. Zekorn, T. de los Arcos, D. Grochla, R. Dahlmann, G. Grundmeier, P. Awakowicz, A. Ludwig, A. Devi (2018) 
PEALD of SiO2 and Al2O3 thin films on polypropylene: Investigations of the film growth at the interface, stress and gas barrier properties of dyads
ACS Appl. Mater. Interfaces 2018, 10, 7422−7434, DOI: 10.1021/acsami.7b14916

pubs.acs.org/doi/abs/10.1021/acsami.7b14916

D. Grochla, L. Banko, J. Pfetzing-Micklich, H. Behm, C. Hopmann, A. Ludwig (2018) 
Si micro-cantilever sensor chips for space-resolved stress measurements in physical and plasma-enhanced chemical vapour deposition
Sensors and Actuators A 270, pp 271-277

www.sciencedirect.com/science/article/pii/S092442471731381X

M. Jaritz, C. Hopmann, H. Behm, D. Kirchheim, S. Wilski, D. Grochla, L. Banko, A. Ludwig, M. Böke, J. Winter (2017)
Influence of residual stress on the adhesion and surface morphology of PECVD-coated polypropylene
Journal of Physics D-Applied Physics, Vol. 50 (44), p 10, DOI: 10.1088/1361-6463/aa8798 

http://iopscience.iop.org/article/10.1088/1361-6463/aa8798/meta

K. Bobzin, T. Brögelmann, N. C. Kruppe, M. Engels, A. von Keudell, A. Hecimovic, A. Ludwig, D. Grochla, L. Banko (2017)
Fundamental study of an industrial reactive HPPMS (Cr,Al)N process
Journal of Applied Physics, Vol. 122, DOI: 10.1063/1.4990997

http://aip.scitation.org/doi/10.1063/1.4990997

D. Music, L. Banko, H. Ruess, M. Engels, A. Hecimovic, D. Grochla, D. Rogalla, T. Brögelmann, A. Ludwig, A. von Keudell, K. Bobzin, J. M. Schneider (2017)
Correlative plasma-surface model for metastable Cr-Al-N: Frenkel pair formation and influence of the stress state on the elastic properties
Journal of Applied Physics, Vol. 121, (21) p 7, DOI: 10.1063/1.4985172

http://aip.scitation.org/doi/10.1063/1.4985172