Combinatorial ultra-high vacuum magnetron sputtering system for fabricating binary, ternary and quaternary thin film material libraries by combining nanoscale wedge-type layers.
Co-deposition means simultaneous coating from multiple coating sources and results in atomic intermixing of the components of a material library.
Setup for high-throughput characterization of temperature-dependent layer stresses.
Measurement principle: the deflection of each cantilever is detected by a laser beam (parallel line optics) reflected from the free ends of the cantilevers onto a screen and captured by a camera (enhanced online).
With the high throughput test stand (HTTS) we measure (I) electrical resistance and (II) magnetoresistance as well as magnetic hysteresis curves of material libraries. Temperature-dependent measurements can be used to identify phase transformations.
X-ray diffraction is used to automatically obtain information on crystal structure and phase constitution for the measurement areas (typically 342) on a materials library.
Microsystems are produced in the clean room using photolithography and other manufacturing processes.
The movie represents a scale bridging journey from the macro scale into the nanocosmos of a superalloy turbine blade. The movie was produced by the Insitute for Materials of the Ruhr-Universität Bochum in the framework of the collaborative research center SFB/TR 103 on single crystal super alloys, which is funded by the Deutsche Forschungsgemeinschaft (DFG).
Copyright: Institut für Werkstoffe - DFB Projekt: SFB-Transregio 103
The Chair for MEMS Materials is represented at the medical technology fair COMPAMED: "Infection protection has many facets." Antibacterial metals have been part of this for some years, but a more recent development is nanostructured surfaces that kill bacteria. "In our video, Prof. Manfred Köller from the Berufsgenossenschaftliche Universitätsklinikum Bergmannsheil, describes how nano-pillars destroy bacteria, and we ask Prof. Alfred Ludwig of the Ruhr-Universität Bochum how he lets the pillars in his laboratory grow on titanium plates and what the wings of the cicada have to do with them."
Quelle: COMPAMED.de