Synthesis of material libraries: wedge-type multilayers

Kombinatorisches SputtersystemCombinatorial ultra-high vacuum magnetron sputtering system for fabricating binary, ternary and quaternary thin film material libraries by combining nanoscale wedge-type layers.



Synthesis of material libraries: Co-Deposition

Kombinatorisches SputtersystemCo-deposition means simultaneous coating from multiple coating sources and results in atomic intermixing of the components of a material library.


High-Throughput Characterization: Thermomechanical Properties


Setup for high-throughput characterization of temperature-dependent layer stresses.

Measurement principle: the deflection of each cantilever is detected by a laser beam (parallel line optics) reflected from the free ends of the cantilevers onto a screen and captured by a camera (enhanced online).


High-Throughput Characterization: Electrical and Magnetic Properties, Phase Transformations

Hochdurchsatz MessstandWith the high throughput test stand (HTTS) we measure (I) electrical resistance and (II) magnetoresistance as well as magnetic hysteresis curves of material libraries. Temperature-dependent measurements can be used to identify phase transformations.

High-Throughput Characterization: Crystallographic Phase Analysis

RöntgenbeugungX-ray diffraction is used to automatically obtain information on crystal structure and phase constitution for the measurement areas (typically 342) on a materials library.


Clean Room

ReinraumMicrosystems are produced in the clean room using photolithography and other manufacturing processes.



From atoms to turbine blades – a scale bridging journey into the nanocosmos of a Ni-base superalloy

SFB Transregio 103The movie represents a scale bridging journey from the macro scale into the nanocosmos of a superalloy turbine blade. The movie was produced by the Insitute for Materials of the Ruhr-Universität Bochum in the framework of the collaborative research center SFB/TR 103 on single crystal super alloys, which is funded by the Deutsche Forschungsgemeinschaft (DFG).

Copyright: Institut für Werkstoffe - DFB Projekt: SFB-Transregio 103

From the cicada to the implant - Bionically inspired materials research

Kooperation mit dem BergmannsheilThe Chair for MEMS Materials is represented at the medical technology fair COMPAMED: "Infection protection has many facets." Antibacterial metals have been part of this for some years, but a more recent development is nanostructured surfaces that kill bacteria. "In our video, Prof. Manfred Köller from the Berufsgenossenschaftliche Universitätsklinikum Bergmannsheil, describes how nano-pillars destroy bacteria, and we ask Prof. Alfred Ludwig of the Ruhr-Universität Bochum how he lets the pillars in his laboratory grow on titanium plates and what the wings of the cicada have to do with them."